An omni-directional mobile millimeter-sized microrobot with 3-mm electromagnetic micromotors for a micro-factory

This paper presents an omni-directional mobile microrobot for micro-assembly in a microfactory. A novel structure is designed for omni-directional movement with three normal wheels. The millimeter-sized microrobot is actuated by four electromagnetic micromotors whose size is 3.1 mm × 3.1 mm × 1.4 mm. Three of the micromotors are for translation and the other one is for steering. The micromotor rotors are designed as the wheels to reduce the microrobot volume. A piezoelectric micro-gripper is fabricated for grasping micro-parts. The corresponding kinematics matrix is analyzed to prove the omni-directional mobility. A control system composed of two CCD cameras, a host computer and circuit board is designed. The macro camera is for a global view and the micro camera is for local supervision. Unique location methods are proposed for different scenarios. A microstep control approach for the micromotors is presented to satisfy the requirement of high positioning accuracy. The experiment demonstrates the mobility of the microrobot and the validity of the control system.